All Vacuum Pump Fluids

Krytox™ VPF are premium synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluids which are the product of choice where complete non-flammability, oxygen compatibility and resistance to aggressive chemicals are requirements.

Low vapor pressures and its ability to be reclaimed make this an excellent choice for plasma, CVD and other semiconductor operations. These synthetic lubricants provide superior performance and extended life as lubricants and sealants in:

  • Vacuum pumps where safety is critical
  • Hostile environments where semiconductor process chemicals can attack most other lubricants
  • Vacuum system valves, seals, bearings, and connectors where low vapor pressure, outgassing, and contamination are intolerable
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Price: 0 – $1,465.35
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  • VPF-1525 RECLAIMED FLUID
    TMC™

    VPF-1525 RECLAIMED FLUID

    VPF-1525 Reclaimed Fluid is equivalent and miscible with Krytox VPF 1525.   TMC Reclaimed Fluids have been tested to ...
    From $125.00
    From $125.00
  • ROTARY SCREW AIR COMPRESSOR OIL - SYNTHETIC ISO 46 ROTARY SCREW AIR COMPRESSOR OIL - SYNTHETIC ISO 46
    TMC™

    ROTARY SCREW AIR COMPRESSOR OIL - SYNTHETIC ISO 46

    TMC's ISO 46 Oil is a long-life, premium compressor lubricant based on novel, proprietary technology. It incorporates...
    From $165.00
    From $165.00
  • KRYTOX 1514 VACUUM PUMP FLUID KRYTOX 1514 VACUUM PUMP FLUID
    Chemours™

    KRYTOX 1514 VACUUM PUMP FLUID

    A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete non-...
    From $28.78
    From $28.78
  • KRYTOX 1506 VACUUM PUMP FLUID KRYTOX 1506 VACUUM PUMP FLUID
    Chemours™

    KRYTOX 1506 VACUUM PUMP FLUID

    A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete non-...
    From $288.01
    From $288.01
  • KRYTOX 1525 VACUUM PUMP FLUID KRYTOX 1525 VACUUM PUMP FLUID
    Chemours™

    KRYTOX 1525 VACUUM PUMP FLUID

    A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete non-...
    From $28.78
    From $28.78
  • VPF-1514 RECLAIMED FLUID
    TMC™

    VPF-1514 RECLAIMED FLUID

    VPF-1514 Reclaimed Fluid is equivalent and miscible with Krytox VPF 1514.   TMC Reclaimed Fluids have been tested to ...
    $795.00
    $795.00
  • INFINX HALOVAV 250 OIL
    Halocarbon

    INFINX HALOVAV 250 OIL

    InfinX HaloVac 250 is a premium vacuum pump fluid oil designed for use in mechanical vacuum pumps at higher temperatu...
    $200.00
    $200.00
  • INFINX HALOVAV 140 OIL
    Halocarbon

    INFINX HALOVAV 140 OIL

    InfinX HaloVac 140 is a premium vacuum pump fluid oil designed for use in mechanical vacuum pumps at moderate tempera...
    $200.00
    $200.00
  • VPF-1506 RECLAIMED FLUID
    TMC™

    VPF-1506 RECLAIMED FLUID

    VPF-1506 Reclaimed Fluid is equivalent and miscible with Krytox VPF 1506.   TMC Reclaimed Fluids have been tested to ...
    $56.25
    $56.25