All Vacuum Pump Fluids

Krytox™ VPF are premium synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluids which are the product of choice where complete non-flammability, oxygen compatibility and resistance to aggressive chemicals are requirements.

Low vapor pressures and its ability to be reclaimed make this an excellent choice for plasma, CVD and other semiconductor operations. These synthetic lubricants provide superior performance and extended life as lubricants and sealants in:

  • Vacuum pumps where safety is critical
  • Hostile environments where semiconductor process chemicals can attack most other lubricants
  • Vacuum system valves, seals, bearings, and connectors where low vapor pressure, outgassing, and contamination are intolerable
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  • KRYTOX 1514 VACUUM PUMP FLUID KRYTOX 1514 VACUUM PUMP FLUID
    Chemours™

    KRYTOX 1514 VACUUM PUMP FLUID

    A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete non-...
    From $28.78
    From $28.78
  • KRYTOX 1506 VACUUM PUMP FLUID KRYTOX 1506 VACUUM PUMP FLUID
    Chemours™

    KRYTOX 1506 VACUUM PUMP FLUID

    A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete non-...
    From $288.01
    From $288.01
  • KRYTOX 1525 VACUUM PUMP FLUID KRYTOX 1525 VACUUM PUMP FLUID
    Chemours™

    KRYTOX 1525 VACUUM PUMP FLUID

    A synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid which is the product of choice where complete non-...
    From $28.78
    From $28.78
  • INFINX HALOVAV 250 OIL
    Halocarbon

    INFINX HALOVAV 250 OIL

    InfinX HaloVac 250 is a premium vacuum pump fluid oil designed for use in mechanical vacuum pumps at higher temperatu...
    $200.00
    $200.00
  • INFINX HALOVAV 140 OIL
    Halocarbon

    INFINX HALOVAV 140 OIL

    InfinX HaloVac 140 is a premium vacuum pump fluid oil designed for use in mechanical vacuum pumps at moderate tempera...
    $200.00
    $200.00