PFPE Vacuum Pump Oils – TMC Industries, Inc.

PFPE Vacuum Pump Oils

Krytox™ VPF are premium synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluids which are the product of choice where complete non-flammability, oxygen compatibility and resistance to aggressive chemicals are requirements.

Low vapor pressures and its ability to be reclaimed make this an excellent choice for plasma, CVD and other semiconductor operations. These synthetic lubricants provide superior performance and extended life as lubricants and sealants in:

  • Vacuum pumps where safety is critical
  • Hostile environments where semiconductor process chemicals can attack most other lubricants
  • Vacuum system valves, seals, bearings, and connectors where low vapor pressure, outgassing, and contamination are intolerable

Technical Datasheet                               Safety Data Sheet
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