TMC Y06-6 PFPE Vacuum Pump Fluid – TMC Industries, Inc.

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TMC Y06-6 PFPE Virgin Vacuum Pump Fluid

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TMC Y06/6 PFPE Virgin vacuum pump fluid sold in bulk by the pound (lb.). Among the many features, this PFPE oil is non-flammable, thermally stable, radioactively stable, has high dielectric properties, and performs in both high and low temperatures. The presence of fluorine in this oil provides thermal, chemical, and oxidative stability. The presence of oxygen provides imparted flexibility to the polymer chain, excellent flow behavior at low temperatures, and a high viscosity index for linear PFPE s. Due to its chemical inertness it is compatible with plastic, metal, and elastomers, and along with a low miscibility with solvents and water.


Vapor Pressure @ 20 °C: 3 x 10-6 torr
Viscosity @ 20 °C (cSt): 64
Viscosity @ 100 °C (cSt): 4
Pour Point: -50 °C
Flash Point: None


  • Does not react with most corrosive vapors or act as a fuel when pumping oxygen or oxidizing agents
  • Withstands high temperatures and oxygen conditions (photo-resist stripping), processes forming Lewis acids (aluminum etching), products from sulfur hexafluoride etching, most acids, bases, and oxidizing agents
  • Applications include extreme operating conditions, pumping oxygen or other oxidants, photo-resist stripping, LPCVD, plasma etching, and reactive ion etching
  • Recommended for direct and belt-driven rotary vane pumps used in extreme operating conditions found in semiconductor processing
  • High thermal stability. Thermal decomposition will only occur at temperatures over 290°C (554°F)
  • Extensively wide temperature range: -100°C to 290°C
  • Weight loss as low as 0.3% at 204 °C


Shipping Policy

We can ship to virtually any address in the world. Note that there are restrictions on some products, and some products cannot be shipped to international destinations.

Shipping Time -- Most orders received before 3:00PM Central Time will ship the same day, provided the product ordered is in stock. Most orders received after 3:00 PM will ship the next business day. Orders are not processed or shipped on Saturday, Sunday or major US holidays.

We cannot guarantee when an order will arrive. Consider any shipping or transit time offered to you by the carrier as an estimate. We encourage you to order in a timely fashion to avoid delays caused by shipping or product availability.

Returns Policy

You may return most new, unopened items within 30 days of delivery for a full refund. We'll also pay the return shipping costs if the return is a result of our error (you received an incorrect or defective item, etc.).

You should expect to receive your refund within four weeks of giving your package to the return shipper, however, in many cases you will receive a refund more quickly. This time period includes the transit time for us to receive your return from the shipper (5 to 10 business days), the time it takes us to process your return once we receive it (3 to 5 business days), and the time it takes your bank to process our refund request (5 to 10 business days).

If you need to return an item, simply login to your account, view the order using the 'Complete Orders' link under the My Account menu and click the Return Item(s) button. We'll notify you via e-mail of your refund once we've received and processed the returned item.

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